Mechanical Performance of a Cascaded V-Shaped Electrothermal Actuator

Design, numerical simulation and experimental investigation of an SU-8 microgripper based on the cascaded V-shaped electrothermal actuators

This paper presents the numerical simulation results and the experimental investigations of a polymeric microgripper designed using the cascaded V-shaped electrothermal actuators. The microgripper was simulated using electro-thermo-mechanical finite element method (FEM) based on Coventorware 2014 software in order to check the performance of the gripper. As structural material of the microgripp...

Parallel-beamslever Electrothermal Out-of-plane Actuator

We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combiniig numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and ...

Simulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method

Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...

Simulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method

Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...

Spatially Varied Flow Profiles in a V-Shaped Side-Channel